TEL FSI, Inc. designs, manufactures, markets, and supports equipment used in the fabrication of microelectronics. The company primarily offers surface conditioning equipment that uses wet, cryogenic, and other chemistry techniques to clean, strip, or etch the surfaces of silicon wafers; and refurbished microlithography products to deposit and develop light sensitive films. Its products include spray cleaning systems, which remove unwanted films and contaminants from the surface of semiconductor wafers at various stages in the microelectronic device fabrication process; single wafer cleaning systems that clean semiconductor wafers in a closed chamber and single wafer environment; cryokinetic processing systems, which remove non-chemically bonded particles from the surface of a microelectronic device; immersion cleaning systems that clean silicon wafers by immersing wafers in multiple tanks filled with process chemicals; and microlithography systems, which deposit polyimide resist and photoresist, light-sensitive, and etch-resistant materials, as well as develop the deposited material after exposure. The company also provides system and subsystem upgrade packages, spare part kits, individual spare part components, robot refurbishment and replacement, and support services to extend the life of previously purchased and installed systems. It offers its products under the ZETA, MERCURY, ORION, ANTARES, and POLARIS names. The company sells its products directly to the microelectronics manufacturers in North America, Europe, Japan, and the Asia Pacific region. TEL FSI, Inc. was formerly known as FSI International, Inc. and changed its name in October, 2012. The company was founded in 1973 and is headquartered in Chaska, Minnesota. As of October 11, 2012, TEL FSI, Inc. operates as a subsidiary of Tokyo Electron U.S. Holdings, Inc.